Combined metal-assisted chemical etching and anisotropic wet etching for anti-reflection inverted pyramidal cavities on dendrite-like textured substrates
نویسندگان
چکیده
منابع مشابه
Wet anisotropic etching of polyimide
With the aim of developing flexible biocompatible implants for in vivo studies of nerve regeneration [1], fabrication of passive polyimide membranes using the commercial available Kapton film (100HN and 50HN, from DuPont) was investigated. Polyimide has been widely used in microelectronics, and its application possibilities have been widening to other fields such as micromachining and biomedica...
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ژورنال
عنوان ژورنال: Results in Physics
سال: 2019
ISSN: 2211-3797
DOI: 10.1016/j.rinp.2018.11.051